| 000 | nam a22 7a 4500 | ||
|---|---|---|---|
| 999 |
_c69248 _d69248 |
||
| 008 | 180926b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9783527334988 | ||
| 040 | _CTUM LIBRARY | ||
| 050 | _aTK 875 .E53 2013 | ||
| 100 | _aWILEY-VCH | ||
| 245 |
_aEnabling Technologies for MEMS and Nanodevices _bAdvanced Micro and Nanosystems |
||
| 260 |
_astrauss GmbH _bGermany _c2013 |
||
| 300 |
_a427P _c24CM |
||
| 500 | _aIncludes Index | ||
| 942 |
_2lcc _cBK |
||