000 00428nam a2200145Ia 4500
001 89865
008 150525s9999 xx 000 0 und d
020 _a9780521822815
100 _aFreund, L, B
245 _aThin Film Materials
_b Stress, Defect Formation and Surface Evolution
260 _aCambridge
_bCambridge University press
_c2003
300 _axviii, 750.:ill
_c.;25cm
500 _aIncludes Index
650 _aThin Films
999 _c57383
_d57383