000 00379nam a2200169Ia 4500
001 6458
008 150525s9999 xx 000 0 und d
020 _a0 08 0221122
040 _CTUM
050 _aTK7878.Y37
100 _aYarwood J
245 _aVaccum And Thin Film Technology
250 _a0
260 _aOxford
_bPergamon Press
_c1978
300 _aill
942 _2lcc
999 _c37827
_d37827