000 00337nam a2200133Ia 4500
001 4250
008 150525s9999 xx 000 0 und d
020 _a471 90148 2
100 _aMorgan V
245 _aAn Introduction To Semiconductor Microtechnology
250 _a0
260 _aChichester
_bJohn Wiley & Sons
_c1983
300 _a,;ill.
999 _c33190
_d33190