000 | 00337nam a2200133Ia 4500 | ||
---|---|---|---|
001 | 4250 | ||
008 | 150525s9999 xx 000 0 und d | ||
020 | _a471 90148 2 | ||
100 | _aMorgan V | ||
245 | _aAn Introduction To Semiconductor Microtechnology | ||
250 | _a0 | ||
260 |
_aChichester _bJohn Wiley & Sons _c1983 |
||
300 | _a,;ill. | ||
999 |
_c33190 _d33190 |