Capacitive silicon resonators : performance enhancement methods / Nguyen Van Toan and Takahito Ono.
Material type:
TextPublisher: Boca Raton, FL : CRC Press/Taylor & Francis Group, [2020]Description: 1 online resourceContent type: text Media type: computer Carrier type: online resourceISBN: 9780429266010; 0429266014; 9780429556524; 0429556527; 9780429565465; 0429565461; 9780429560996; 0429560990Subject(s): Dielectric resonators | Electric resonators | Nanoelectromechanical systems | Semiconductors | TECHNOLOGY / Electricity | TECHNOLOGY / Electronics / Circuits / General | TECHNOLOGY / Electronics / MicroelectronicsDDC classification: 621.3815 LOC classification: TK7872.D53 | T63 2020ebOnline resources: Taylor & Francis | OCLC metadata license agreement Summary: "Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"-- Provided by publisher.
"Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"-- Provided by publisher.
OCLC-licensed vendor bibliographic record.