TY - BOOK AU - Korotchenkov,G.S. TI - Sensing materials and technologies T2 - Handbook of humidity measurement SN - 9781351056489 AV - QC915 U1 - 551.5710287 23 PY - 2020/// CY - Boca Raton PB - CRC Press KW - Hygrometry KW - Humidity KW - Water vapor, Atmospheric KW - Spectrum analysis N1 -

Section i Humidity-Sensitive Materials

Chapter 1 Polymers .................................................................................................................................................................. 3

Chapter 2 Metal Oxide in Humidity Sensors ......................................................................................................................... 23

Chapter 3 Al2O3 as a Humidity-Sensitive Material ............................................................................................................... 35

Chapter 4 Carbon-Based Materials ........................................................................................................................................ 51

Chapter 5 Semiconductor-Based Humidity Sensors .............................................................................................................. 91

Chapter 6 Porous Silicon ...................................................................................................................................................... 109

Chapter 7 Mesoporous Silica and Its Prospects for Humidity Sensor Application ............................................................ 139

Chapter 8 Aluminosilicate (Zeolites)-Based Humidity Sensors ........................................................................................ 151

Chapter 9 Metal Phosphate-Based Humidity Sensitive Materials ...................................................................................... 163

Chapter 10 Black Phosphorus and Phosphorene-Based Humidity Sensors ..........................................................................171

Chapter 11 Metal-Organic Framework-Based Humidity Sensors ........................................................................................ 187

Chapter 12 Supramolecular Materials .................................................................................................................................. 209

Chapter 13 Biomaterials as Sensing Elements of Humidity Sensors ................................................................................... 223

Section ii Sensor technologies and Related Materials

Chapter 14 Substrates and Electrodes in Humidity Sensors ................................................................................................ 229

Chapter 15 Fundamentals of Microfabrication Technologies...............................................................................................

Chapter 16 Micromachining Platforms for Humidity Sensors and Examples of Their Fabrication .................................... 263

Chapter 17 Platforms and Materials for QCM and SAW-Based Humidity Sensors ............................................................ 271

Chapter 18 Technologies Suitable for Fabrication of Humidity Sensing Layers: General Consideration ............................ 281

Chapter 19 Polymer Technologies ........................................................................................................................................ 305

Chapter 20 Synthesis of Humidity-Sensitive Metal Oxides: Powder Technologies ............................................................. 339

Chapter 27 Comparative Analysis of Humidity Sensors and Their Advantages and Shortcomings ................................... 445

Chapter 28 Market of Electronic Humidity Sensors ............................................................................................................ 453

UR - https://www.taylorfrancis.com/books/9781351056502 UR - http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf ER -