TY  - BOOK
AU  - WILEY-VCH
TI  - Enabling Technologies for MEMS and Nanodevices: Advanced Micro and Nanosystems
SN  - 9783527334988
AV  - TK 875 .E53 2013 
PY  - 2013///
CY  - strauss GmbH
PB  - Germany
N1  - Includes Index
ER  -