Enabling Technologies for MEMS and Nanodevices Advanced Micro and Nanosystems

By: WILEY-VCHMaterial type: TextTextPublisher: strauss GmbH Germany 2013Description: 427P 24CMISBN: 9783527334988LOC classification: TK 875 .E53 2013
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Books Books TUM Main Campus
TK 815 .E53 2013 (Browse shelf) Available 039075

Includes Index

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