Korotchenkov, G. S.

Sensing materials and technologies / Ghenadii Korotcenkov. - 1st. - 1 online resource : illustrations (black and white). - Handbook of humidity measurement ; 3 .

Section i Humidity-Sensitive Materials

Chapter 1 Polymers .................................................................................................................................................................. 3

Chapter 2 Metal Oxide in Humidity Sensors ......................................................................................................................... 23

Chapter 3 Al2O3 as a Humidity-Sensitive Material ............................................................................................................... 35

Chapter 4 Carbon-Based Materials ........................................................................................................................................ 51

Chapter 5 Semiconductor-Based Humidity Sensors .............................................................................................................. 91

Chapter 6 Porous Silicon ...................................................................................................................................................... 109

Chapter 7 Mesoporous Silica and Its Prospects for Humidity Sensor Application ............................................................ 139

Chapter 8 Aluminosilicate (Zeolites)-Based Humidity Sensors ........................................................................................ 151

Chapter 9 Metal Phosphate-Based Humidity Sensitive Materials ...................................................................................... 163

Chapter 10 Black Phosphorus and Phosphorene-Based Humidity Sensors ..........................................................................171

Chapter 11 Metal-Organic Framework-Based Humidity Sensors ........................................................................................ 187

Chapter 12 Supramolecular Materials .................................................................................................................................. 209

Chapter 13 Biomaterials as Sensing Elements of Humidity Sensors ................................................................................... 223

Section ii Sensor technologies and Related Materials

Chapter 14 Substrates and Electrodes in Humidity Sensors ................................................................................................ 229

Chapter 15 Fundamentals of Microfabrication Technologies...............................................................................................

Chapter 16 Micromachining Platforms for Humidity Sensors and Examples of Their Fabrication .................................... 263

Chapter 17 Platforms and Materials for QCM and SAW-Based Humidity Sensors ............................................................ 271

Chapter 18 Technologies Suitable for Fabrication of Humidity Sensing Layers: General Consideration ............................ 281

Chapter 19 Polymer Technologies ........................................................................................................................................ 305

Chapter 20 Synthesis of Humidity-Sensitive Metal Oxides: Powder Technologies ............................................................. 339

Chapter 27 Comparative Analysis of Humidity Sensors and Their Advantages and Shortcomings ................................... 445

Chapter 28 Market of Electronic Humidity Sensors ............................................................................................................ 453



9781351056489 1351056484 9781351056496 1351056492 9781351056472 1351056476 9781351056502 1351056506

10.1201/9781351056502 doi


Hygrometry.
Humidity.
Water vapor, Atmospheric.
Spectrum analysis.

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